Browsing by author "Bergman, E."
Now showing items 1-5 of 5
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Evaluation of ozonated water spray for resist cleaning applications
De Gendt, Stefan; Lux, Marcel; Claes, Martine; Jassal, A. S.; Van Hoeymissen, Jan; Lagrange, Sébastien; Bergman, E.; Mertens, Paul; Heyns, Marc (1999) -
Evaluation of ozonated water spray for resist cleaning applications
De Gendt, Stefan; Lux, Marcel; Claes, Martine; Van Hoeymissen, Jan; Conard, Thierry; Worth, W.; Lagrange, Sébastien; Bergman, E.; Jassal, A. S.; Mertens, Paul; Heyns, Marc (2000) -
Making the cleaner greener
Bergman, E.; Lagrange, Sébastien; Claes, M. (2001) -
Ozonated HF applications in a spray processing tool
Claes, M.; Röhr, Erika; De Gendt, Stefan; Heyns, Marc; Lagrange, Sébastien; Bergman, E. (2001) -
Ozonated HF applications in a spray processing tool
Claes, Martine; Röhr, Erika; De Gendt, Stefan; Lagrange, Sébastien; Bergman, E.; Heyns, Marc (2002)