Authors

De Gendt, Stefan; Lux, Marcel; Claes, Martine; Jassal, A. S.; Van Hoeymissen, Jan; Lagrange, Sébastien; Bergman, E.; Mertens, Paul; Heyns, Marc

Conference

Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title

Evaluation of ozonated water spray for resist cleaning applications

Publication type

Meeting abstract

Embargo date

9999-12-31