Browsing by author "Vroom, R."

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Alternative post-etch polymer removal in a single-wafer platform

Dundas, C.; Vroom, R.; Ghekiere, John; Van Doorne, Patrick; Rink, I.; Sharp, I.; Heffernan, S. (2003)
The use of ozonated water as a resist strip and post ash clean in a production fab

Vroom, R.; De Gendt, Stefan (1999)