Browsing by author "De Caussemaeker, Ann"
Now showing items 1-3 of 3
-
HF etching of Si-oxides and Si-nitrides for surface micromachining
Du Bois, Bert; Vereecke, Guy; Witvrouw, Ann; De Moor, Piet; Van Hoof, Chris; De Caussemaeker, Ann; Verbist, Agnes (2001) -
The design and fabrication of a 2560x2048 pixel microdisplay chip
De Smet, Herbert; Van Den Steen, Jean; Carchon, Nadine; Cuypers, Dieter; De Backere, Christof; Vermandel, Miguel; Van Calster, Andre; De Caussemaeker, Ann; Witvrouw, Ann; Ziad, Hocine; Baert, Kris; Colson, Paul; Schols, G.; Tack, Marnix (1999) -
Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab
Tilmans, Harrie; Ziad, Hocine; Jansen, Henri; Di Monaco, Orsola; Jourdain, Anne; De Raedt, Walter; Rottenberg, Xavier; De Backer, E.; De Caussemaeker, Ann; Baert, Kris (2001)