HF etching of Si-oxides and Si-nitrides for surface micromachining

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Authors
Du Bois, Bert; Vereecke, Guy; Witvrouw, Ann; De Moor, Piet; Van Hoof, Chris; De Caussemaeker, Ann; Verbist, Agnes
Conference
Proceedings of the Sensor Technology Conference 2001
Title
HF etching of Si-oxides and Si-nitrides for surface micromachining
Publication type
Proceedings paper
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