Publication:
HF etching of Si-oxides and Si-nitrides for surface micromachining
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2098 since deposited on 2021-10-14
16last month
6last week
Acq. date: 2026-09-16
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Statistics
Views
2098 since deposited on 2021-10-14
16last month
6last week
Acq. date: 2026-09-16
Citations