Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab

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Authors
Tilmans, Harrie; Ziad, Hocine; Jansen, Henri; Di Monaco, Orsola; Jourdain, Anne; De Raedt, Walter; Rottenberg, Xavier; De Backer, E.; De Caussemaeker, Ann; Baert, Kris
Conference
Proceedings IEDM; Washington, DC, December 3-5, 2001.
Title
Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab
Publication type
Proceedings paper
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