Publication:

Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab

Date

2001
Proceedings Paper
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dc.contributor.authorTilmans, Harrie
dc.contributor.authorZiad, Hocine
dc.contributor.authorJansen, Henri
dc.contributor.authorDi Monaco, Orsola
dc.contributor.authorJourdain, Anne
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorDe Backer, E.
dc.contributor.authorDe Caussemaeker, Ann
dc.contributor.authorBaert, Kris
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.imecauthorZiad, Hocine
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.date.accessioned2021-10-14T18:00:02Z
dc.date.available2021-10-14T18:00:02Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5712
dc.source.beginpage921
dc.source.conferenceProceedings IEDM; Washington, DC, December 3-5, 2001.
dc.source.conferencelocation
dc.source.endpage924
dc.title

Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab

dc.typeProceedings paper
dspace.entity.typePublication
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