Publication:

Wafer-level packaged RF-MEMS switches fabricated in a CMOS fab

Date

2001
Proceedings Paper
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Author(s)

Tilmans, Harrie  
;
Ziad, Hocine  
;
Jansen, Henri
;
Di Monaco, Orsola
;
Jourdain, Anne  
;
De Raedt, Walter  
;
Rottenberg, Xavier  
;
De Backer, E.
;
De Caussemaeker, Ann
;
Baert, Kris

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2027 since deposited on 2021-10-14
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