Browsing by author "Mani, Antonio"
Now showing items 1-5 of 5
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Characterizing and modeling electrical response to light for metal based EUV photoresists
Vaglio Pret, Alessandro; Kocsis, Michael; De Simone, Danilo; Vandenberghe, Geert; Stowers, Jason; Giglia, Angelo; De Schepper, Peter; Mani, Antonio; Biafore, John J. (2016) -
Detection, binning, and analysis of defects in a GaN-on-Si process for high brightness light emitting diodes
Halder, Sandip; Miller, Andy; Osman, Haris; Dutta, Barundeb; Mani, Antonio; Jones, Chris; McCance, Syd; Burkeen, Frank (2012) -
GaN-on-Si process defect detection and analysis for HB-LEDs and power devices
Halder, Sandip; Stiers, Karen; Kandaswamy, Prem Kumar; Rosmeulen, Maarten; Carbonell, Laure; Saripalli, Yoga; Osman, Haris; Rosseel, Erik; Mani, Antonio; Hu, Qiona; Vedula, Srinivas; Polli, Marco (2013) -
Process window discovery, expansion and control of design hotspots susceptible to overlay failures
Sah, Kaushik; Cross, Andrew; Mani, Antonio; Van Den Heuvel, Dieter; Foubert, Philippe (2017) -
XAS photoresists electron/quantum yields study with synchrotron light
De Schepper, Peter; Vaglio Pret, Alessandro; Hansen, Terje; Giglia, Angelo; Hoshiko, Kenji; Mani, Antonio; Biafore, John J. (2015)