GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

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Authors
Halder, Sandip; Stiers, Karen; Kandaswamy, Prem Kumar; Rosmeulen, Maarten; Carbonell, Laure; Saripalli, Yoga; Osman, Haris; Rosseel, Erik; Mani, Antonio; Hu, Qiona; Vedula, Srinivas; Polli, Marco
Conference
24th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC
Title
GaN-on-Si process defect detection and analysis for HB-LEDs and power devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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