Publication:

GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

Date

2013
Proceedings Paper
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dc.contributor.authorHalder, Sandip
dc.contributor.authorStiers, Karen
dc.contributor.authorKandaswamy, Prem Kumar
dc.contributor.authorRosmeulen, Maarten
dc.contributor.authorCarbonell, Laure
dc.contributor.authorSaripalli, Yoga
dc.contributor.authorOsman, Haris
dc.contributor.authorRosseel, Erik
dc.contributor.authorMani, Antonio
dc.contributor.authorHu, Qiona
dc.contributor.authorVedula, Srinivas
dc.contributor.authorPolli, Marco
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorStiers, Karen
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.imecauthorOsman, Haris
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorMani, Antonio
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.date.accessioned2021-10-21T08:06:21Z
dc.date.available2021-10-21T08:06:21Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22452
dc.source.beginpage371
dc.source.conference24th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC
dc.source.conferencedate13/05/2013
dc.source.conferencelocationSaratoga Springs, NY USA
dc.source.endpage374
dc.title

GaN-on-Si process defect detection and analysis for HB-LEDs and power devices

dc.typeProceedings paper
dspace.entity.typePublication
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