Browsing by author "Vemula, Sri Charan"
Now showing items 1-4 of 4
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Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Koelling, Sebastian; Verheyden, R.; Vandervorst, Wilfried; Raineri, V.; Giannazzo, F.; Verheijen, M.; Kim, D.H. (2007) -
Impact of the environmental conditions on the electrical characteristics of scanning spreading resistance microscopy
Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Vandervorst, Wilfried (2008) -
Scanning spreading resistance microscopy for the calibration of process simulators on 65nm MOS technology.
Vemula, Sri Charan; Eyben, Pierre; De Keersgieter, An; Mody, Jay; Vandervorst, Wilfried (2007) -
Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
Eyben, Pierre; Vemula, Sri Charan; Noda, T.; Vandervorst, Wilfried (2009)