Authors

Eyben, Pierre; Mody, Jay; Vemula, Sri Charan; Koelling, Sebastian; Verheyden, R.; Vandervorst, Wilfried; Raineri, V.; Giannazzo, F.; Verheijen, M.; Kim, D.H.

Conference

International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and Modeling

Title

Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies

Publication type

Oral presentation