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Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
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Authors
Eyben, Pierre
;
Vemula, Sri Charan
;
Noda, T.
;
Vandervorst, Wilfried
Conference
9th International Workshop on Junction Technology - IWJT
Title
Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
Publication type
Proceedings paper
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