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Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
Publication:
Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
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Date
2009
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Eyben, Pierre
;
Vemula, Sri Charan
;
Noda, T.
;
Vandervorst, Wilfried
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1962
since deposited on 2021-10-17
2
last month
Acq. date: 2025-12-11
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Metrics
Views
1962
since deposited on 2021-10-17
2
last month
Acq. date: 2025-12-11
Citations