Browsing by author "Ward, Brian"
Now showing items 1-5 of 5
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Checking design conformance and optimizing manufacturability using automated double-patterning decomposition
Cork, Christopher M.; Ward, Brian; Barnes, Levi D.; Painter, Ben; Lucas, Kevin; Luk-Pat, Gerry; Wiaux, Vincent; Verhaegen, Staf; Maenhoudt, Mireille (2008) -
EUV modeling accruracy and integration requirements for the 16nm node
Zavyalova, Lena; Su, Irene; Jang, Stephen; Cobb, Jonathan; Ward, Brian; Sorensen, Jacob; Song, Hua; Gao, Weimin; Lucas, Kevin; Lorusso, Gian; Hendrickx, Eric (2010) -
Evaluation of the mask topography effect on te OPC modeling of hole patterns
Ward, Brian (2008) -
Exploration of etch step interactions in the dual patterning process for process modeling
Melvin, Lawrence; Ward, Brian; Song, H.; Rhie, S.U.; Lucas, K.D.; Wiaux, Vincent; Verhaegen, Staf; Maenhoudt, Mireille (2008) -
Flare mitigation strategies in extreme ultraviolet lithography
Kim, Insung; Myers, Alan; Melvin, Lawrence; Ward, Brian; Lorusso, Gian; Jonckheere, Rik; Goethals, Mieke; Ronse, Kurt (2008)