Exploration of etch step interactions in the dual patterning process for process modeling

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Authors

Melvin, Lawrence; Ward, Brian; Song, H.; Rhie, S.U.; Lucas, K.D.; Wiaux, Vincent; Verhaegen, Staf; Maenhoudt, Mireille

ISSN

1071-1023

Issue

6

Journal

Journal of Vacuum Science and Technology B

Volume

26

Title

Exploration of etch step interactions in the dual patterning process for process modeling

Publication type

Journal article

Embargo date

9999-12-31

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