Flare mitigation strategies in extreme ultraviolet lithography

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Authors

Kim, Insung; Myers, Alan; Melvin, Lawrence; Ward, Brian; Lorusso, Gian; Jonckheere, Rik; Goethals, Mieke; Ronse, Kurt

ISSN

0167-9317

Issue

5_6

Journal

Microelectronic Engineering

Volume

85

Title

Flare mitigation strategies in extreme ultraviolet lithography

Publication type

Journal article

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