Browsing by author "Papavieros, George"
Now showing items 1-5 of 5
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Computational nanometrology of line edge roughness: recent challenges and advances
Constantoudis, Vassilios; Papavieros, George; Lorusso, Gian; Gogolides, Evangelos (2017) -
Computational nanometrology of line edge roughness: recent challenges and advances
Constantoudis, Vassilios; Papavieros, George; Lorusso, Gian; Gogolides, Evangelos (2017) -
Computational nanometrology of line-edge roughness: noise effectd, cross-line correlations and the role of etch transfer
Constantoudis, Vassilios; Papavieros, George; Lorusso, Gian; Rutigliani, Vito; Van Roey, Frieda; Gogolides, Evangelos (2018) -
Deep learning nanometrology of line edge roughness
Giannatou, Eva; Constantoudis, Vassilios; Papavieros, George; Papageorgiou, Harris; Rutigliani, Vito; Lorusso, Gian; Van Roey, Frieda; Gogolides, Evangelos (2019) -
Setting up a proper power spectral density (PSD) and autocorrelation analysis for material and process characterization
Rutigliani, Vito; Lorusso, Gian; De Simone, Danilo; Lazzarino, Frederic; Rispens, Gijsbert; Papavieros, George; Gogolides, Evangelos; Costantoudis, Vassilios; Mack, Chris (2018)