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Computational nanometrology of line-edge roughness: noise effectd, cross-line correlations and the role of etch transfer
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1922 since deposited on 2021-10-25
422item.page.metrics.field.last-week
Acq. date: 2025-10-24
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Views
1922 since deposited on 2021-10-25
422item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations