Browsing by author "Brown, Jim"

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Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms

Halder, Sandip; Truffert, Vincent; Van Den Heuvel, Dieter; Leray, Philippe; Cheng, Shaunee; McIntyre, Greg; Sah, Kaushik; Brown, Jim; Parisi, Paolo; Polli, Marco (2015)
The use of eDR-71xx for DSA defect review and automated classification

Pathangi Sriraman, Hari; Van Den Heuvel, Dieter; Bayana, Hareen; Bouckou, Loemba; Brown, Jim; Parisi, Paolo; Gosain, Rohan (2015)