Authors

Halder, Sandip; Truffert, Vincent; Van Den Heuvel, Dieter; Leray, Philippe; Cheng, Shaunee; McIntyre, Greg; Sah, Kaushik; Brown, Jim; Parisi, Paolo; Polli, Marco

Conference

26th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC

Title

Inspection challenges for triple patterning at sub-14 nm nodes with broadband plasma inspection platforms

Publication type

Proceedings paper

Embargo date

9999-12-31