Browsing by author "Gardner, M."

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Charge trapping and electron mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Young, C.D.; Kerber, Andreas; Hou, T.H.; Cartier, Eduard; Brown, G.A.; Bersuker, G.; Kim, Y.; Lim, C.; Gutt, J.; Lysaght, P.; Bennett, J.; Lee, C.H.; Gopalan, S.; Gardner, M.; Zeitzoff, P.; Groeseneken, Guido; Murto, R.W.; Huff, H.R. (2004)
Charge trapping and mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Young, C.D.; Kerber, Andreas; Hou, T.H.; Cartier, E.; Brown, G.A.; Bersuker, G.; Kim, Y.; Lim, C.; Gutt, J.; Lysaght, P.; Bennett, J.; Lee, C.H.; Gopalan, S.; Gardner, M.; Zeitzoff, P.; Groeseneken, Guido; Murto, R.W.; Huff, H.R. (2003)