Authors

Young, C.D.; Kerber, Andreas; Hou, T.H.; Cartier, Eduard; Brown, G.A.; Bersuker, G.; Kim, Y.; Lim, C.; Gutt, J.; Lysaght, P.; Bennett, J.; Lee, C.H.; Gopalan, S.; Gardner, M.; Zeitzoff, P.; Groeseneken, Guido; Murto, R.W.; Huff, H.R.

Conference

Physics and Technology of High-k Gate Dielectrics II

Title

Charge trapping and electron mobility degradation in MOCVD hafnium silicate gate dielectric stack structures

Publication type

Proceedings paper