Browsing by author "Granneman, E.H.A."
Now showing items 1-4 of 4
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A HF vapour etch process for integration in cluster-tool processes: characteristics and applications
Vermeulen, W.J.C.; kwakman, L.F.T.; Werkhoven, C.J.; Granneman, E.H.A.; Verhaverbeke, Steven; Heyns, Marc (1994) -
Characterization of high-throughput spatial ALD Al2O3 as surface passivation for industrial local Al BSF Si solar cells
Vermang, Bart; Goverde, Hans; Rothschild, Aude; John, Joachim; Poortmans, Jef; Mertens, Robert; Vermont, P.; Vanormelingen, Koen; Granneman, E.H.A. (2011) -
Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Machkaoutsan, Vladimir; Mertens, Sofie; Bauer, R.; Lauwers, Anne; Verheyden, Kurt; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Caymax, Matty; Jakschik, Stefan; Theodore, D.; Absil, Philippe; Thomas, S.; Granneman, E.H.A. (2007) -
Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability
Vermont, P.G.; Pages, X.; Granneman, E.H.A.; Vanormelingen, Koen; Verheyden, K.; Mertens, Sofie (2007)