Publication:

Improved thermal stability of Ni-silicides on Si:C epitaxial layers

Date

2007

Journal article

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Files

15683.pdf 788.38 KB

Author(s)

Machkaoutsan, Vladimir

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;

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Verheyden, Kurt

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Vanormelingen, Koen

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Verheyen, Peter

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Jakschik, Stefan

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;

Absil, Philippe

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;

Granneman, E.H.A.

Journal

Microelectronic Engineering

Metrics

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Acq. date: 2026-01-08