Publication:

Improved thermal stability of Ni-silicides on Si:C epitaxial layers

Date

2007
Journal article
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Author(s)

Machkaoutsan, Vladimir  
;
Mertens, Sofie  
;
Bauer, R.
;
Lauwers, Anne  
;
Verheyden, Kurt
;
Vanormelingen, Koen
;
Verheyen, Peter  
;
Loo, Roger  
;
Caymax, Matty  
;
Jakschik, Stefan
;
Theodore, D.
;
Absil, Philippe  
;
Thomas, S.
;
Granneman, E.H.A.

Journal

Microelectronic Engineering

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