Improved thermal stability of Ni-silicides on Si:C epitaxial layers

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Authors
Machkaoutsan, Vladimir; Mertens, Sofie; Bauer, R.; Lauwers, Anne; Verheyden, Kurt; Vanormelingen, Koen; Verheyen, Peter; Loo, Roger; Caymax, Matty; Jakschik, Stefan; Theodore, D.; Absil, Philippe; Thomas, S.; Granneman, E.H.A.
Journal
Microelectronic Engineering
Volume
84
Title
Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Publication type
Journal article
Embargo date
9999-12-31
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