Authors

Vermeulen, W.J.C.; kwakman, L.F.T.; Werkhoven, C.J.; Granneman, E.H.A.; Verhaverbeke, Steven; Heyns, Marc

Conference

Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title

A HF vapour etch process for integration in cluster-tool processes: characteristics and applications

Publication type

Proceedings paper

Embargo date

9999-12-31