A HF vapour etch process for integration in cluster-tool processes: characteristics and applications

Publication:

1994

Proceedings Paper

Author(s)

Vermeulen, W.J.C.

;

kwakman, L.F.T.

;

Werkhoven, C.J.

;

Granneman, E.H.A.

;

Verhaverbeke, Steven

;

Heyns, Marc

2214 since deposited on 2021-09-29

5last month

Acq. date: 2026-09-11