Browsing by author "Vos, I."

Copper CMP using a Lam teres linear planarization technology

Vos, I.; Meuris, Marc; Sijmus, Bram; Stella, Mario; Delaney, N.; Gobbin, Korneel (2001)

High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene

Jenei, Snezana; Decoutere, Stefaan; Winderickx, Gillis; Struyf, Herbert; Tokei, Zsolt; Vervoort, Iwan; Vos, I.; Jaenen, Patrick; Carbonell, Laure; De Jaeger, Brice; Donaton, R. A.; Vanhaelemeersch, Serge; Maex, Karen; Nauwelaers, Bart (2001)

Integration feasibility of porous SiLK semiconductor dielectric

Waeterloos, Joost; Struyf, Herbert; Van Aelst, Joke; Castillo, D. W.; Lucero, S.; Caluwaerts, Rudy; Alaerts, Carine; Mannaert, Geert; Boullart, Werner; Sleeckx, Erik; Schaekers, Marc; Tokei, Zsolt; Vervoort, Iwan; Steenbergen, Johnny; Sijmus, Bram; Vos, I.; Meuris, Marc; Iacopi, Francesca; Donaton, R (2001)

Integration of a low permittivity spin-on embedded hardmask for Cu/SiLK resin dual damascene

Waeterloos, Joost; Shaffer, E. O.; Stokich, T.; Hetzner, J.; Price, D.; Booms, L.; Donaton, R. A.; Beyer, Gerald; Coenegrachts, Bart; Caluwaerts, Rudy; Struyf, Herbert; Tokei, Zsolt; Vervoort, Iwan; Sjjmus, B.; Vos, I.; Maex, Karen; Komiya, Takayuki; Iwashita, J. M. (2001)

Integration of Cu and low-K dielectrics: effect of hard mask and dry etch on electrical performance of damascene structures

Donaton, R. A.; Coenegrachts, Bart; Maenhoudt, Mireille; Pollentier, Ivan; Struyf, Herbert; Vanhaelemeersch, Serge; Vos, I.; Meuris, Marc; Fyen, Wim; Beyer, Gerald; Tokei, Zsolt; Stucchi, Michele; Vervoort, Iwan; De Roest, David; Maex, Karen (2001)