Publication:

High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene

Date

2001

Proceedings Paper

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Author(s)

;

Decoutere, Stefaan

;

Winderickx, Gillis

;

Struyf, Herbert

;

;

;

;

Jaenen, Patrick

;

Carbonell, Laure

;

De Jaeger, Brice

;

;

Vanhaelemeersch, Serge

;

;

Nauwelaers, Bart

Statistics

2004 since deposited on 2021-10-14

Acq. date: 2026-02-26