Publication:

High Q inductor add-on module in thick Cu/SiLK/sup TM/ single damascene

Date

2001
Proceedings Paper
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Author(s)

Jenei, Snezana
;
Decoutere, Stefaan  
;
Winderickx, Gillis  
;
Struyf, Herbert  
;
Tokei, Zsolt  
;
Vervoort, Iwan
;
Vos, I.
;
Jaenen, Patrick  
;
Carbonell, Laure
;
De Jaeger, Brice  
;
Donaton, R. A.
;
Vanhaelemeersch, Serge  
;
Maex, Karen  
;
Nauwelaers, Bart  

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2005 since deposited on 2021-10-14
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2005 since deposited on 2021-10-14
Acq. date: 2026-04-05

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