Browsing by imec author "7aea8710c58733525d84a859f79df52b7b082fa3"

A synchrotron radiation photoelectron spectroscopy study on atomic-scale wet etching of InAs (111)-A and (111)-B in acidic peroxide solutions: surface chemistry versus kinetics

Abrenica, Graniel; Lebedev, M. V.; Fingerle, M.; Arnauts, Sophia; Calvet, W.; Mayer, T.; De Gendt, Stefan; van Dorp, Dennis (2022)

Atomic-scale investigations on the wet etching kinetics of Ge versus SiGe in acidic H2O2 solutions: a post operando synchrotron XPS analysis

Abrenica, Graniel; Lebedev, Mikhail; Fingerle, Mathias; Arnauts, Sophia; Bazzazian, Nina; Calvet, Wolfram; Porret, Clément; Bender, Hugo; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2020)

Atomic-Scale Investigations on the Wet Etching of Group IV Semiconductors in Acidic H2O2 Solution: The Case Ge Versus Si-Ge

van Dorp, Dennis; Abrenica, Graniel; Mayer, T.; Arnauts, Sophia; Altamirano Sanchez, Efrain; De Gendt, Stefan (2021-05)

Characterization and (electro)chemical studies of halide-passivated Ge (100) surfaces in acidic solutions

Abrenica, Graniel; Lebedev, Mikhail; Le, Hy; Hajduk, Andreas; Fingerle, Mathias; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2019)

Etching and passivation of group IV semiconductors: Ge and SiGe

Abrenica, Graniel (2020-10)

Photoanodic pyramid texturization of n-Ge (100) in HCl solution: unexpected anisotropy in the surface chemistry of etching

Abrenica, Graniel; Lebedev, Mikhail; Le, Hy; Hajduk, Andreas; Fingerle, Mathias; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2019)

Photoelectrochemical etching inducing n-type Ge (100) pyramid texturization probed by integrated electrochemical chamber/X-ray photoelectron spectroscopy

Abrenica, Graniel; Lebedev, Mikhail; Le, Hy; Hajduk, Andreas; Fingerle, Mathias; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2019)

Surface Chemistry and Nanoscale Wet Etching of Group IV Semiconductors in Acidic H2O2 Solutions

lebedev, Mikhail; Mayer, Thomas; van Dorp, Dennis; Abrenica, Graniel; Arnauts, Sophia; Altamirano Sanchez, Efrain; De Gendt, Stefan (2021-02)

Towards atomic-layer-scale processing of high mobility channel materials in acidic solutions for N5 and N7 technology nodes

van Dorp, Dennis; Arnauts, Sophia; Abrenica, Graniel; Holsteyns, Frank (2016)

Unexpected pyramid texturization of n-type Ge (100) via electrochemical etching: bridging surface chemistry and morphology

Abrenica, Graniel; Lebedev, Mikhail; Le, Hy; Hajduk, Andreas; Fingerle, Mathias; Mayer, Thomas; De Gendt, Stefan; van Dorp, Dennis (2018)