Browsing by author "Paniez, P."

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Lithographic performance of 193 nm resist

Goethals, Mieke; Pollers, Ingrid; Van Roey, Frieda; Sugihara, Takashi; Ronse, Kurt; Heskamp, B.; Davies, G.; Gehoel-van Ansem, W.; Paniez, P.; Temerson, T. M.; Hien, S.; Mortini, B.; Romeo, C. (1998)
Robust and environmentally stable deep UV positive resist: optimization of SUCCESS ST2

Schwalm, R.; Binder, H.; Fischer, T.; Funhoff, D.; Goethals, Mieke; Grassmann, A.; Moritz, H.; Paniez, P.; Reuhman-Huisken, M.; Vinet, F.; Dijkstra, H.; Krause, A. (1994)