Browsing by author "Danilkin, Evgeny"

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Effect of quartz window temperature on plasma composition during STI etch

Danilkin, Evgeny; Shamiryan, Denis; Baklanov, Mikhaïl; Milenin, Alexey; Boullart, Werner; Krasnikov, G.; Gutschin, O; Mochalov, A (2008)
Influence of the top chamber window temperature on the STI etch process

Shamiryan, Denis; Danilkin, Evgeny; Tinck, Stefan; Klick, Michael; Milenin, Alexey; Baklanov, Mikhaïl; Boullart, Werner (2010)