Browsing by author "Howard, William B."

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Assessment of OPC effectiveness using two-dimensional metrics

Wiaux, Vincent; Philipsen, Vicky; Jonckheere, Rik; Vandenberghe, Geert; Verhaegen, Staf; Hoffmann, Thomas; Ronse, Kurt; Howard, William B.; Maurer, Wilhelm; Preil, Moshe E. (2002)
OPC aware mask and wafer metrology

Maurer, Wilhelm; Wiaux, Vincent; Jonckheere, Rik; Philipsen, Vicky; Hoffmann, Thomas; Verhaegen, Staf; Ronse, Kurt; England, Jonathan G.; Howard, William B. (2002)