Browsing by author "Kim, Eunji"

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Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation

Delabie, Annelies; Brunco, David; Conard, Thierry; Favia, Paola; Bender, Hugo; Franquet, Alexis; Sioncke, Sonja; Vandervorst, Wilfried; Van Elshocht, Sven; Heyns, Marc; Meuris, Marc; Kim, Eunji; McIntyre, Paul C.; Saraswat, Krishna C.; LeBeau, James M.; Cagnon, Joel; Stemmer, Susanne; Tsai, Wilman (2008)
Impact of precursors in the atomic layer deposition of high-k dielectrics on semiconductor substrates

Delabie, Annelies; Nyns, Laura; Popovici, Mihaela Ioana; Caymax, Matty; Van Elshocht, Sven; Brunco, David; Swerts, Johan; Maes, Jan Willem; Kim, Eunji; McIntyre, Paul (2008)