Authors

Delabie, Annelies; Nyns, Laura; Popovici, Mihaela Ioana; Caymax, Matty; Van Elshocht, Sven; Brunco, David; Swerts, Johan; Maes, Jan Willem; Kim, Eunji; McIntyre, Paul

Conference

China Semiconductor Material International Conference - CSMIC

Title

Impact of precursors in the atomic layer deposition of high-k dielectrics on semiconductor substrates

Publication type

Meeting abstract