Publication:
Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1996 since deposited on 2021-10-17
1last month
Acq. date: 2026-10-12
Citations
Statistics
Views
1996 since deposited on 2021-10-17
1last month
Acq. date: 2026-10-12
Citations