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Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
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Authors
Delabie, Annelies
;
Brunco, David
;
Conard, Thierry
;
Favia, Paola
;
Bender, Hugo
;
Franquet, Alexis
;
Sioncke, Sonja
;
Vandervorst, Wilfried
;
Van Elshocht, Sven
;
Heyns, Marc
;
Meuris, Marc
;
Kim, Eunji
;
McIntyre, Paul C.
;
Saraswat, Krishna C.
;
LeBeau, James M.
;
Cagnon, Joel
;
Stemmer, Susanne
;
Tsai, Wilman
ISSN
0013-4651
Issue
12
Journal
Journal of the Electrochemical Society
Volume
155
Title
Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
Publication type
Journal article
Embargo date
9999-12-31
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