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Atomic layer deposition of hafnium oxide on Ge and GaAs substrates: precursors and surface preparation
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1989 since deposited on 2021-10-17
2last month
Acq. date: 2026-01-11
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Metrics
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1989 since deposited on 2021-10-17
2last month
Acq. date: 2026-01-11
Citations