Browsing by author "Matsuda, Takashi"
Now showing items 1-3 of 3
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A methodology for double patterning compliant split and design
Wiaux, Vincent; Verhaegen, Staf; Iwamoto, Fumio; Maenhoudt, Mireille; Matsuda, Takashi; Postnikov, Sergey; Vandenberghe, Geert (2008) -
Alternative process schemes for double patterning that eliminate the intermediate etch step
Maenhoudt, Mireille; Gronheid, Roel; Stepanenko, Nickolay; Matsuda, Takashi; Vangoidsenhoven, Diziana (2008) -
Split and design guidelines for double patterning
Wiaux, Vincent; Verhaegen, Staf; Cheng, Shaunee; Iwamoto, Fumio; Jaenen, Patrick; Maenhoudt, Mireille; Matsuda, Takashi; Postnikov, Sergey; Vandenberghe, Geert (2008)