Browsing by author "Semenova, O."
Now showing items 1-4 of 4
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A new high-rate deposition method for thin film crystalline Si solar cells
Sharafutdinov, R.; Khmel, S.; Semenova, O.; Svitasheva, S.; Bilyalov, Renat; Poortmans, Jef (2002) -
Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method
Bilyalov, Renat; Poortmans, Jef; Sharafutdinov, R.; Khmel, S.; Schukin, V.; Semenova, O.; Fedina, L. (2003) -
Microcrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method
Bilyalov, Renat; Poortmans, Jef; Sharafutdinov, R.; Khmel, S.; Shchukin, V.; Semenova, O.; Fedina, L.; Kolesov, B. (2003) -
Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
Semenova, O.; Svitasheva, S.; Sharafutdinov, R.; Khmel, S.; Tschukin, V.; Poortmans, Jef; Bilyalov, Renat (2002)