Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
Metadata
Show full item record
Authors
Semenova, O.
;
Svitasheva, S.
;
Sharafutdinov, R.
;
Khmel, S.
;
Tschukin, V.
;
Poortmans, Jef
;
Bilyalov, Renat
Conference
Seminar on Silicon Crystal and Film Growth and Lattice Defects - SILICON 2002
Title
Properties of silicon layers deposited from supersonic streams activated by electron-beam plasma
Publication type
Proceedings paper
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login