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Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method
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Authors
Bilyalov, Renat
;
Poortmans, Jef
;
Sharafutdinov, R.
;
Khmel, S.
;
Schukin, V.
;
Semenova, O.
;
Fedina, L.
Issue
4
Journal
IEE Proceedings - Circuits, Devices and Systems
Volume
150
Title
Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method
Publication type
Journal article
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