Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method

Author(s)

Bilyalov, Renat

;

;

Sharafutdinov, R.

;

Khmel, S.

;

Schukin, V.

;

Semenova, O.

;

Fedina, L.

IEE Proceedings - Circuits, Devices and Systems

1929 since deposited on 2021-10-15

Acq. date: 2025-10-23