Publication:
Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method
Date
| dc.contributor.author | Bilyalov, Renat | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Sharafutdinov, R. | |
| dc.contributor.author | Khmel, S. | |
| dc.contributor.author | Schukin, V. | |
| dc.contributor.author | Semenova, O. | |
| dc.contributor.author | Fedina, L. | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-15T04:01:35Z | |
| dc.date.available | 2021-10-15T04:01:35Z | |
| dc.date.issued | 2003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/7215 | |
| dc.source.beginpage | 293 | |
| dc.source.endpage | 299 | |
| dc.source.issue | 4 | |
| dc.source.journal | IEE Proceedings - Circuits, Devices and Systems | |
| dc.source.volume | 150 | |
| dc.title | Microcrystalline and polycrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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