Browsing by author "Rusu, C."

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Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures

Mehta, Anshu; Gromova, Maria; Rusu, C.; Baert, Kris; Van Hoof, Chris; Witvrouw, Ann; Richard, Olivier (2004-01)
Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process

Witvrouw, Ann; Rusu, C.; Janssen, Henri; Gunn, Robert (2004)