Authors

Mehta, Anshu; Gromova, Maria; Rusu, C.; Baert, Kris; Van Hoof, Chris; Witvrouw, Ann; Richard, Olivier

Conference

17th IEEE International Conference in Micro Electro Mechanical Systems - MEMS

Title

Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures

Publication type

Proceedings paper