Publication:
Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures
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1956 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-11
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Metrics
Views
1956 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-11
Citations