Browsing by author "Mariano, Marina"
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Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Mochi, Iacopo; Timmermans, Marina; Gallagher, Emily; Mariano, Marina; Pollentier, Ivan; Rajendran, Rajeev; Helfenstein, Patrick; Fernandez, Sara; Kazazis, Dimitrios; Ekinci, Yasin (2019) -
Free-standing carbon nanotube films for extreme ultraviolet pellicle application
Timmermans, Marina; Pollentier, Ivan; Mariano, Marina; Korytov, Maxim; Liebens, Maarten; Schapmans, Elie; Huyghebaert, Cedric; Gallagher, Emily (2019)