Authors

Timmermans, Marina; Pollentier, Ivan; Mariano, Marina; Korytov, Maxim; Liebens, Maarten; Schapmans, Elie; Huyghebaert, Cedric; Gallagher, Emily

Conference

NT19: International Conference on the Science and Application of Nanotubes and Low-Dimensional Materials

Title

Free-standing carbon nanotube films for extreme ultraviolet pellicle application

Publication type

Proceedings paper