Publication:
Free-standing carbon nanotube films for extreme ultraviolet pellicle application
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2193 since deposited on 2021-10-27
14last month
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Acq. date: 2026-09-20
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Statistics
Views
2193 since deposited on 2021-10-27
14last month
8last week
Acq. date: 2026-09-20
Citations