Publication:

Free-standing carbon nanotube films for extreme ultraviolet pellicle application

Date

2019
Proceedings Paper
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dc.contributor.authorTimmermans, Marina
dc.contributor.authorPollentier, Ivan
dc.contributor.authorMariano, Marina
dc.contributor.authorKorytov, Maxim
dc.contributor.authorLiebens, Maarten
dc.contributor.authorSchapmans, Elie
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorGallagher, Emily
dc.contributor.imecauthorTimmermans, Marina
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorMariano, Marina
dc.contributor.imecauthorKorytov, Maxim
dc.contributor.imecauthorLiebens, Maarten
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorGallagher, Emily
dc.contributor.orcidimecTimmermans, Marina::0000-0001-9805-8259
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecGallagher, Emily::0000-0002-2927-8298
dc.date.accessioned2021-10-27T19:41:54Z
dc.date.available2021-10-27T19:41:54Z
dc.date.issued2019
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/34126
dc.source.conferenceNT19: International Conference on the Science and Application of Nanotubes and Low-Dimensional Materials
dc.source.conferencedate21/07/2019
dc.source.conferencelocationWürzburg Germany
dc.title

Free-standing carbon nanotube films for extreme ultraviolet pellicle application

dc.typeProceedings paper
dspace.entity.typePublication
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